Triple-axis Prealigners LPA Series

The isel IPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics. The prealigners are designed and manufactured by Logosol, Inc. USA and isel Germany AG is the exclusive authorized distributor for Europe.

Characteristics

• Alignment cycle time < 2,5 Seconds

• Contactless measuring via LED and CCD senor

• Integrated scan electronics

• Chuck Load

• Wafer size changing without mechanical changes

• Transparent, semi-transparent, punched and opaque wafers alignable

• SEMI, Flat and notch wafer specifications

• For wafer sizes from 2'' up to 12''

• Side-entry and back entry cable configurations