Series 1 wafer handlers robots with 3-Link-Heavy Duty-Arm and Standard-Body

are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

Characteristics

Excellent structural rigidity

Maximum reliability and precision

Top mounted (TA) or bottom mounted (BA) versions available

Customized designs

Absolute (digital) or incremental encoder

Seamless integration with prealigner, linear track and other periphal components

High-End Controller as an option

Including "Standard" or "Advanced" Hard- & Software

Made in Germany