Series 1 wafer handlers robots

are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

Characteristics

Excellent strucutural rigidity

Maximum reliability and precision

Top mounted (TA) or bottom mounted (BA) versions available

Customized designs

Absolute or incremental encoder

Seamless integration with prealigner, linear track and other periphal

Including "Standard" or "Advanced" Hard- & Software

ISO 1 clean-room environment compatible

Made in Germany