Contact information

Address: Kauppatie 10 A, 65610 MUSTASAARI | Contact person: Ronny Hellström

E-mail: ronny.hellstrom@etss.fi | Telephone:0504361920

Business ID: 2510604-7

 

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  • Product description

    IWH Series 1 with 2 link compact arm and 7 inch body series 1

     

    Series 1 wafer handlers robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

     

    Characteristics

    cost-effective

    excellent structural rigidity and precision

    maximum reliability

    top mounted (TA) or bottom mounted (BA) versions available

    customized designs

    incremental encoder

    seamless integration with prealigner, linear track and other periphal components

    including „Standard“ controller and software

    ISO 1 clean-room environment compatible

    MTBF: > 50,000 operating hours

     

  • CAD DATA