iselROBOTIK
End effectors - IEE Series
Excellent structural rigidity
CAD DATA
Product description
End effectors - IEE Series
Characteristics
For wafer, masks & filmrings up to 12" (300 mm)
Modular concept
Low own weight
Excellent structural rigidity
Good cost/ performance ratio
Options
Diverse Wafer mapping sensors
Several surface coatings
Special designs:
Pocket EE
Friction Wafer - Edge Grip EE
Exclusion zone Grip EE
Exclusion zone Vacuum EE
Multiple EE
Thru Beam E
Address: Kauppatie 10 A, 65610 MUSTASAARI | Contact person: Ronny Hellström
E-mail: ronny.hellstrom@etss.fi | Telephone:0504361920
Business ID: 2510604-7
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End effectors - IEE Series
Characteristics
For wafer, masks & filmrings up to 12" (300 mm)
Modular concept
Low own weight
Excellent structural rigidity
Good cost/ performance ratio
Options
Diverse Wafer mapping sensors
Several surface coatings
Special designs:
Pocket EE
Friction Wafer - Edge Grip EE
Exclusion zone Grip EE
Exclusion zone Vacuum EE
Multiple EE
Thru Beam E