Innovative Designing, High-Quality Production, Installing and Maintenance.

ETSS

EN

SV

FI

iselROBOTIK

Efficient & economical wafer handlers

End effectors - IEE Series

 

Excellent structural rigidity

Submitting Form...

The server encountered an error.

Form received.

Contact information

Address: Kauppatie 10 A, 65610 MUSTASAARI | Contact person: Ronny Hellström

E-mail: ronny.hellstrom@etss.fi | Telephone:0504361920

Business ID: 2510604-7

 

© All Rights Reserved.

  • Product description

    End effectors - IEE Series

     

    Characteristics

    For wafer, masks & filmrings up to 12" (300 mm)

    Modular concept

    Low own weight

    Excellent structural rigidity

    Good cost/ performance ratio

     

    Options

    Diverse Wafer mapping sensors

    Several surface coatings

     

    Special designs:

    Pocket EE

    Friction Wafer - Edge Grip EE

    Exclusion zone Grip EE

    Exclusion zone Vacuum EE

    Multiple EE

    Thru Beam E

     

  • CAD DATA