Edge Handling Prealigner LPA-Series

The isel LPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics.

The prealigners are designed and manufactured by Logosol, Inc. USA and isel Germany AG is the exclusive authorized distributor for Europe.

Characteristics

• innovative All-in-one-Design

• Alignment cycke timw < 3.5 seconds

• Repeating accuracy: linear ±0,025 mm, circular ± 0,05°

• Contactless measuring via LED and CCD sensor

• Integrated scan electronics

• stand.alone capable

• Chuck- or Pinload as well as wafer size changing without machanical changes

• transparent, semi-transparent, punched and opaque wafers alignable

• SEMI, Flat and Notch wafer specifications

• For wafer sizes from 2'' up to 12''

• Bottom-entry and side entry cable configurations