iselROBOTIK
Single Axis Prealigner "Embedded"
The LPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics.
CAD DATA
Product description
Single Axis Prealigner "Embedded"
The LPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics.
The Prealigners are designed and manufactured by Logosol, Inc. USA and isel Germany AG is the exclusive authorized distributor for Europe.
Characteristics
• Alignment cycle time < 2,5 Seconds
• Contactless measuring via LED and CCD senor
• Integrated scan electronics
• Chuck Load
• Wafer size changing without mechanical changes
• Transparent, semi-transparent, punched and opaque wafers alihnable
• SEMI, Flat and notch wafer specifications
• For wafer sizes from 3'' up to 12''
• Side-entry and back entry cable configurations
Address: Kauppatie 10 A, 65610 MUSTASAARI | Contact person: Ronny Hellström
E-mail: ronny.hellstrom@etss.fi | Telephone:0504361920
Business ID: 2510604-7
© All Rights Reserved.
Single Axis Prealigner "Embedded"
The LPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics.
The Prealigners are designed and manufactured by Logosol, Inc. USA and isel Germany AG is the exclusive authorized distributor for Europe.
Characteristics
• Alignment cycle time < 2,5 Seconds
• Contactless measuring via LED and CCD senor
• Integrated scan electronics
• Chuck Load
• Wafer size changing without mechanical changes
• Transparent, semi-transparent, punched and opaque wafers alihnable
• SEMI, Flat and notch wafer specifications
• For wafer sizes from 3'' up to 12''
• Side-entry and back entry cable configurations